EE143 Laboratory Manual  Spring 2006 

Overview and Video Tutorials

• Course overview 
• Past Teaching Assistants 
• EE143 Lab: Lithograph module video 
• EE143 Lab: Furnace oxidation module video 
• EE143 Lab: Metal Deposition module video 
• EE143 Lab: Probe Station  module video
• TA's manual and a checklist 

• Weekly Quiz Instructions 
• Week-3 Quiz   Prelab Instructions Week-3  Week-3 measurements checklist
• Week-4 Quiz   Prelab Instructions Week-4  Week-4 measurements checklist
• Week-5 No Quiz  Microlab Tour
• Week-6 Quiz   Prelab Instructions Week-6  Week-6 measurements checklist
• Week-7 Quiz   Prelab Instructions Week-7  Week-7 measurements checklist
• Week-8 Quiz   Prelab Instructions Week-8  Week-8 measurements checklist
• Week-9 Quiz   Prelab Instructions Week-9  Week-9 measurements checklist
• Week-10 Quiz Prelab Instructions Week-10  Week-10 measurements checklist
• Week-11 Quiz Prelab Instructions Week-11
• Week-12 Quiz Prelab Instructions Week-12

Lab Part I: Fabrication

• Chip Layout and Device Structures/Sizes  
• IC Process Overview 
• Detailed IC Process Flow 
• Furnace process tips 
• MEMS  Structure Overview
• MEMS Process Flow
• Lab Report 1 Instructions S2006 
•  

  Lab Part II: Device Characterization

• Metrics Tutorial
• Metrics Manual
• Device Characterization 
• Capacitance Measurement Tips
• Summary of MOSFET Parameters 
• Expected MEMS Characteristics  Data
• SEM Pictures of MEMS structure (3 Mbytes!)
• Lab Report 2 Instructions S2006

Laboratory Reference

• Safety, Cleaning, and Chemical Disposal Procedures 
• Vernier Tutorial
• Etch rate database for commonly used etchants 
• XeF2 etching of silicon
• Laboratory Equipment Inventory 
• Kasper Mask Aligner Manual 
• NanoSpec Manual 
• Four-Point Probe Manual 
• Description of a Basic Vacuum System 
• Aluminum evaporator manual 

Useful Links

• EECS Departmental Policy on Academic Honesty
• Device Physics Visualization 

Process Simulation and the Tools

• How to access TSUPREM 
• Simulate EE143 MOSFET Device 
• SIMPL Manual 
• SAMPLE Tutorial