EE143 IC-MEMS Chip Layout
Obtain a zoomed view and brief description of a feature by clicking
the feature inventory list.
Feature Inventory
Itemized by label number on the chip.
Label #
Feature Name
Location in Above Image
1A
Resolution Test Patterns (1 per mask)
Left Center
1B
Alignment Marks and Verniers
Left Bottom
2A
Diffused Resistor
Left Center
2B
Poly Resistor
Left Center
2C
Metal-to-Diffusion Contact Chain
Left Bottom
2D
Metal-to-Poly Contact Chain
Left Bottom
3
Field Oxide Capacitor
Center
4
Gate Oxide Capacitor
Center
5
Intermediate Oxide Capacitor
Center
6A
Junction Capacitor
Center
6B
Long Periphery Junction Capacitor
Center
7
Diode
Center
8
MOSFETs of various lengths
Center Bottom
9
Long Channel MOSFETs
Center Bottom
10
Large MOSFET
Center Bottom
11
Field Oxide MOSFET
Center Bottom
12
Circular MOSFET
Center Bottom
13
Lateral BJTs
Center
14
Inverter
Center Bottom
15
NOR Gate
Center Bottom
16
Ring Oscillator (17 stages + buffer)
Right Bottom
17A
Metal-Poly Contact Resistance Test Structure
Right Top
17B
Metal-Diffusion Contact Resistance Test Structure
Right Top
18
Aluminum-SiO2 Bimorph
Right Center
19
Campanile
Right Top
20
Cantilever Array
Left Top
21
Heater Platform
Right Bottom
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Designers' Initials
Center Bottom