EE143 Microfabrication Technologies
Spring 2006 Course
Information
Teaching Staff:
Instructor :
Prof. Nathan Cheung , Cory 513, 642-1615, cheung@eecs.berkeley.edu
Lecture Hours : Tu,Th 8:10-9:30am, 150 GSPP
Prof Cheung's Office Hours: Tu 11am-1pm, W 1pm-2pm
TA Office Hours
Shong Yin shong2@uclink.berkeley.edu, Head-TA, M 11am-12am , Cory 382
Kinyip Phoa kinyip@eecs.berkeley.edu, F 12pm-1pm, Cory 382
Angela Wu angelawu@berkeley.edu, M 4pm-5pm , Cory 297
Jing Zhou jzhou@newton.berkeley.edu, Tu 1pm-2pm , Cory 382
Homework Reader
Liz Wu, lwu@calmail.berkeley.edu
COURSE DESCRIPTION
Prerequisite: EE40/E100 and Physics 7B or equivalent, http://www-inst.eecs.berkeley.edu/~ee40/
EE143
teaches the fundamentals of integrated-circuit (IC) fabrication and surface-micromachining
technology, giving the student a basic understanding of IC and micromachining
processes and the effect of processing choices on device performance. Students
learn to use process simulation tools and also fabricate and characterize
devices in the laboratory. This lecture part will cover the processing
techniques and design methodologies of microfabrication. We will discuss the
process modules: lithography, thermal oxidation, diffusion, ion implantation,
etching, thin-film deposition, epitaxy, metallization. The second part of the
course will cover process simulation, layout design rules, MOS, IC, and MEMS
process integration. The laboratory part of the course will provide
students opportunities to have hands-on experience to fabricate and
characterize a NMOS chip with simple
MEMS components.
Homework:
Homework assignments will be handed out every Tue, due in class the following
Thur.
Midterm Exam 1 3/1(Wed), 6:00-7:30pm, MULFORD Room159, closed book exam, 4 sheets of handwritten notes allowed
Midterm
Exam 2
4/5(Wed) 6:00-7:30pm, GPB Room 100, closed book exam 8 sheets of handwritten notes
allowed
Grading: Midterm1 15%,Midterm2 15%, Final 30% ,Homework 10%, Lab 30%
(Undergrad and Grad students will be graded as two separate groups)
Textbooks:
1)
Required EE143 Reader and Lecture Notes
2)
Required R.C. Jaeger "Introduction To Microelectronics Fabrication
", 2nd Edition, Prentice Hall
References:
W.
Maly:"Atlas of IC Technologies" (excellent 3D drawings of IC
Structures)
M.
Madou, “Fundamentals of Microfabrication,” CRC Press (MEMS technology)
S.
Campbell: "The Science and Engineering of Microelectronic Fabrication"
,2nd Edition (Intermediate/ Advanced Text)
Plummer,
Deal and Griffin, “Silicon VLSI Technology,” Prentice Hall (Advanced Text on
mechanisms and modeling)
Ben
Streetman, “Solid State Electronic Devices”, Prentice Hall, 4th
Edition (Quick introduction to devices)
Spring 2006 Teaching Schedule
Week # |
Topics |
Required
Reading |
| 1(1/16) |
IC
and MEMS Microfabrication Overview, (NO
HOMEWORK ASSIGNMENT THIS WEEK)
|
Bank, “Introduction to Microengineering” http://www.dbanks.demon.co.uk/ueng/ |
|
2
(1/23) |
IC
and MEMS device structures Simple
process sequence Semiconductor
mobile carriers |
Jaeger
Chapter 1, Reader [Introduction to IC Devices, www.icknowledge.com] Reader
[Streetman Chap 3, Energy bands and charge carriers in semiconductors] |
|
3
(1/30) |
Thermal
Oxidation and Applications |
Jaeger
Chap 3 Reader
[Mayer-Lau, Chapter 9] |
|
4
(2/6) |
Dopant
engineering :Ion Implantation |
Jaeger
Chap 5 Reader
[Mayer-Lau, Chapter 8] |
|
5
(2/13) |
Dopant
engineering: Diffusion |
Jaeger
Chap 4 Reader
[Wolf, Chap 8 Diffusion in Si] |
|
6
(2/20) |
Lithography
|
Jaeger
Chap 2 Reader
[Sze, Chapter 11 on
Lithography] |
|
7
(2/27) |
Midterm Exam #1 3/1(wed) 6:00-7:30pm |
Jaeger
Chap 6 Reader
[Campbell -Chapter 13 on CVD] Reprint:
What is a Vacuum, Sputtering Deposition |
|
8
(3/6) |
Etching |
Reader
[Anan ,Chap 10 on Etching] |
|
9
(3/13) |
Metallization,
Planarization |
Jaeger
Chap 7 Reader
[Campbell, Chap 15 on Isolation and Metallization] |
|
10
(3/20) |
Layout Design Rules Process Integration |
Reader
[Uyemura, Chap 3] Reader [Chen, Chap 3 CMOS Process Integration] |
|
11
(3/27) |
Spring Recess |
|
|
12
(4/3) |
Process Integration MOS Devices Midterm Exam #2 4/5 (wed) 6:00-7:30pm |
Jaeger
Chap 9 Reader
[ Streetman, Chap 8.3, MOS
Principle] |
|
13
(4/10) |
MOS Devices
|
Jaeger
Chap 9 Reader
[ Streetman, Chap 8.3, MOS
Principle] |
|
14
(4/17) |
MEMS Structures and Fabrication Techniques |
Jaeger
Chap 11 Reader
[Kovac, Chapter 3 on Mechanical Transducers] |
|
15
(4/24) |
MEMS
Process Integration |
Reader [Kovac, Chapter 3 on Mechanical Transducers] |
| 16 (5/1) |
Nanofabrication,
Recent Developments |
Lecture
Notes and Reprints |
|
17 (5/8) |
Final Exam Review |
|
Some useful info:
If your IE Browser cannot run applets at the http://jas.eng.buffalo.edu/ site, download java runtime environment from www.java.com
To run lab videos:
I can't get the lab module videos on the EE 143 website to work on my computer
at home. Windows media player gives me the following error message:
"The server received invalid data from the client on the control
connection."
Solution: It's actually a TCP/IP network level message. If you
are running a firewall make sure your firewall doesn't block the traffic for
windows media player program. If you are running a VPN client, turn off your
VPN client and try again. Also on your Windows media player remove the
support for UDP and TCP "just keep the HTTP as an active protocol".
* Open Windows Media Player
* Choose "Tools" from the
top menu
* Choose "Options" in the
tools menu
* Click on the "Network"
tab
* Remove the checks from the boxes
next to "Multicast", "UDP" and "TCP" just keep
the HTTP active
* Click on "OK"
* Close Windows media player
* Try the streaming videos again
Khossrov Taherian
http://california.eecs.berkeley.edu/khossrov
Last updated 4/20/2006
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