University of California, Berkeley Electrical Engineering and Computer Sciences Department
EE143 Laboratory Manual Spring 2008 Microfabrication Technologies LAB Location Cory 218, Phone: 643-8136
Overview and Video Tutorials Course overview EE143 Lab: Lithograph module video EE143 Lab: Furnace oxidation module video EE143 Lab: Metal Deposition module video EE143 Lab: Probe Station module video TA's manual and a checklist	Laboratory Handouts General Grading Policy Week 3 Lab Tutorial Self-Evaluation Quiz Lab Instructions Measurement Notes Week 4 Self-Evaluation Quiz Lab Instructions Measurement Notes Week 5 Lab Instructions Week 6 Self-Evaluation Quiz Lab Instructions Measurement Notes Week 7 Self-Evaluation Quiz Lab Instructions Measurement Notes Week 8 Self-Evaluation Quiz Lab Instructions Measurement Notes Week 9 Self-Evaluation Quiz Lab Instructions Measurement Notes Week 10 Self-Evaluation Quiz Lab Instructions Measurement Notes Week 11 Self-Evaluation Quiz Lab Instructions Week 12 Self-Evaluation Quiz Lab Instructions Lab Reports Report 1 Report 2
Lab Part I: Fabrication Chip Layout and Device Structures/Sizes IC Process Overview Detailed IC Process Flow Furnace process tips MEMS Structure Overview MEMS Process Flow Lab Report 1 Instructions	Lab Part II: Device Characterization Metrics Tutorial Metrics Manual Device Characterization Capacitance Measurement Tips Summary of MOSFET Parameters Expected MEMS Characteristics Data SEM Pictures of MEMS structure (3 Mbytes!) Lab Report 2 Instructions
Laboratory Reference Safety, Cleaning, and Chemical Disposal Procedures Vernier Tutorial Etch rate database for commonly used etchants XeF2 etching of silicon Laboratory Equipment Inventory Kasper Mask Aligner Manual NanoSpec Manual Four-Point Probe Manual Description of a Basic Vacuum System Aluminum evaporator manual	Useful Links EECS Departmental Policy on Academic Honesty Device Physics Visualization
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University of California, Berkeley
Electrical Engineering and Computer Sciences Department