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EE143 Microfabrication
Technologies
Fall 2010 Course Information
Instructor : Prof. Nathan Cheung , Cory 513,
642-1615, cheung@eecs.berkeley.edu
Lecture Hours : Tu,Th 2:10-3:30pm, Wheeler 220
Prof Cheung's Office Hours: Tuesday 1-2pm, Thursday 3:30-4:30pm. and by appointment, CORY 513
TA Office Hours
Byron Ho (Head-TA), bho@eecs.berkeley.edu, Friday 12-1pm CORY 382
Chenlu
Hou, clhou@berkeley.edu,
Monday 1:30-2:30 pm,
CORY 382
Wookhyun
Kwon, whkwon10@eecs.berkeley.edu,
Wed 1-2pm, CORY 382
Homework Reader
John Gerling, jgerling@berkeley.edu
COURSE DESCRIPTION
Prerequisite: EE40/E100 and Physics 7B or equivalent, http://www-inst.eecs.berkeley.edu/~ee40/
EE143 teaches the fundamentals of integrated-circuit (IC)
fabrication and surface-micromachining technology, giving the student a basic
understanding of IC and micromachining processes and the effect of processing
choices on device performance. Students learn to use process simulation tools
and also fabricate and characterize devices in the laboratory. This lecture
part will cover the processing techniques and design methodologies of microfabrication. We will discuss the process modules:
lithography, thermal oxidation, diffusion, ion implantation, etching, thin-film
deposition, epitaxy, metallization. The second part
of the course will cover process simulation, layout design rules, MOS, IC, and MEMS process
integration. The laboratory part of the course will provide students
opportunities to have hands-on experience to fabricate and characterize a NMOS
chip with simple
MEMS components.
Homework:
Homework assignments will be posted online every Tue, due by 9am the following
Friday.
Your best ten efforts will be counted towards your course grade.
LAB : Lab attendance is mandatory. Students will work as teams of two. Grading will be based two lab reports and your lab participation.
Grading: Midterm1 15%, Midterm2 15%, Final 30% ,Homework 10%, Lab 30%
(Undergrad and Grad students will be graded as two separate groups)
Textbooks:
1) Required EE143 Reprints and Lecture Notes
2) Required R.C. Jaeger "Introduction To
Microelectronics Fabrication ", 2nd Edition, Prentice Hall
References:
W. Maly, Atlas of IC Technologies
(excellent 3D drawings of IC Structures)
M. Madou, Fundamentals of Microfabrication, CRC Press (MEMS technology)
Plummer, Deal and Griffin, Silicon VLSI Technology,
Prentice Hall (Advanced Text on mechanisms and modeling)
Ben Streetman, Solid State Electronic Devices”,
Prentice Hall, 5th Edition (Quick introduction to devices)
Fall 2010 Lecture Schedule
Week #
|
Topics |
Required Reading |
|
1 (8/26) |
Course overview and introduction (NO HOMEWORK ASSIGNMENT THIS WEEK) |
http://jas.eng.buffalo.edu/education/fab/pn/diodeframe.html |
|
2 (8/30) |
Introduction to process modules, process flow, and electronic materials. IC and MEMS Device Structures. |
Jaeger Chapter 1 Reader : Introduction to IC Devices, http://www-inst.eecs.berkeley.edu/~ee143/fa10/handouts/IC_devices.pdf |
|
3 (9/6) |
Lithography
|
Jaeger Chap 2 Standing Wave Notes, http://www-inst.eecs.berkeley.edu/~ee143/fa10/handouts/standing_wave_notes.pdf |
|
4 (9/13) |
Thermal Oxidation |
Jaeger Chap 3 Reader [Mayer-Lau, Chapter 9] |
|
5 (9/20) |
Dopant engineering :Ion
Implantation |
Jaeger Chap 5 Reader [Mayer-Lau, Chapter 8] |
|
6 (9/27) |
Dopant engineering: Diffusion |
Jaeger Chap 4 Reader [Sections of Wolf Chapter 9 on Diffusion] |
|
7 (10/4) |
|
Jaeger Chap 6 Reader [Sections of Reprint: What is a Vacuum |
|
8 (10/11) |
Midterm Exam #1 (10/12) Barrows
166 Etching |
Reader [Anner, Chapter 10
Etching] |
|
9 (10/18) |
Metallization, Planarization |
Jaeger Chap 7 Reader [Campbell, Chap 15 on Isolation and Metallization] |
|
10 (10/25) |
MOS Integration |
Reader [Maly, Atlas of ICs] Jaeger Chap 9 |
|
11 (11/1) |
Layout, Devices Physics |
Reader [Uyemura, Design Rule Basics] |
|
12 (11/8) |
MOS Design (11/11) Veterans Day |
Reader [ Streetman, Chap 8.3, MOS Principle] |
|
13 (11/15) |
Midterm Exam #2 (11/16) Moffitt 101 MOS Characteristics |
Reader [ Streetman, Chap 8.3, MOS Principle] |
|
14 (11/22) |
MEMS Structures and Fabrication Thanksgiving (11/24) |
Jaeger Chap 11 Reader [Kovac, Chapter 3 on
Mechanical Transducers] |
|
15 (11/29) |
MEMS Structures and Fabrication |
Jaeger Chap 11 Reader [Kovac, Chapter 3 on
Mechanical Transducers] |
|
16 (12/6) |
RRR Week Topics of contemporary
interest Nanofabrication, Solar Cells, LEDs |
Lecture Notes and Reprints |
|
|
Final Exam 12/14 (Tue) 8-11am |
|
Last updated 11/14/2010
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