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EE143 Microfabrication Technologies

LAB Location Cory 218, Phone 643-8136

EE143 Laboratory Manual  Fall 2010
Overview and Video Tutorials Course overview Past Teaching Assistants EE143 Lab: Lithograph module video EE143 Lab: Furnace oxidation module video EE143 Lab: Metal Deposition module video EE143 Lab: Probe Station  module video TA's manual and a checklist	Weekly Quiz No Prelab Quiz for Week 12 Lan Instructions same as Week 11 Week 11 Instructions
PART I: Fabrication Chip Layout Fabrication Process Detailed NMOS Process Furnace Process Tips Old MEMS Structure Overview Old MEMS Process Flow Lab Report 1 Instructions (due 11/12 Friday 5pm)	PART II: DEVICE CHARACTERIZATION Metrics Tutorial Metrics Manual Device Characterization Capacitance Measurement Tips Summary of MOSFET Parameters Expected old MEMS Characteristics Data SEM Pictures of old MEMS Structures Lab Report 2 Instruction (due 12/10/2010 5pm) Pictures of Comb Drive Fall 2010 MEMS Process Flow
Manuals Safety, Cleaning, and Chemical Disposal Procedures Vernier Tutorial Etch Rate Database for commonly used etchants XeF2 etching of silicon Laboratory Equipment Inventory Kasper Mask Aligner Manual Nanospec Manual Four Point Probe Manual Basic Vacuum System Aluminum evaporator Manual	Process and Device Simulation Department Policy on Academic Honesty Device Physics Visualization How to access process simulator TSUPREM Simulate EE143 MOSFET Device Simulation of EE143 MOSFET Devices Topography and Layout Simulation SIMPL Lithography and Topography Simulation SAMPLE

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Last modified  on 11/1/2010
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