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EE143 Microfabrication Technologies
Fall  2010  Special Handouts

• Devices Overview Article Highly recommended reading for students who had not taken EE105 or EE130.
• Si Crystal paper model
• Notes on Implantation Range Data
• Notes on Dopant Diffusion
• A brief tutorial on defects
• Notes on CVD Kinetics  
• Layout graph paper
• Step-by-step guide to VT Calculation
• Stress in thin films reprint

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Last updated  10/01/2010
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