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EE143 Microfabrication Technologies

LAB Location Cory 218, Phone 643-8136

EE143 Laboratory Manual  Fall 2010 

Overview and Video Tutorials

Weekly Quiz

No Prelab Quiz for Week 12

Lan Instructions same as Week 11

Week 11 Instructions


PART I: Fabrication

          Chip Layout

          Fabrication Process

          Detailed  NMOS Process

    Furnace Process Tips  

   Old MEMS Structure Overview

  Old MEMS Process Flow

  Lab Report 1 Instructions (due 11/12 Friday 5pm)










      Process and Device Simulation






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Last modified  on 11/1/2010
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