EE 245 / NEEM 6441: Introduction to MEMS Design

Spring 2007








Announcements (updated 3/5):

  • Homework 5 is posted and due on 3/29
  • Cadence instructions have been posted for help with hw4.
  • Homework 4 is posted and due on 3/15
  • Homework 3 is posted and due on 3/1
  • Homework 2 is posted and due on 2/8
  • Kris Pister's famous fold-up Silicon crystal. If you're looking for something to put on your desk to impress your co-workers (or to better understand silicon crystal planes), print this out and fold it up.
  • Homework 1 is posted and due on 1/30.
  • Introductory conference call to be held at 10am PST on January 4, 2007. See email from CalVIEW office for more information. Please join the call to become acquainted with how the course will operate.
  • Class mailing list:, when asking questions that may be of a concern of the whole class, e.g., regarding homework, please use this email alias so everyone will receive a copy.

Course Description:

The course will begin with a summary of integrated circuit fabrication technologies leading into an overview of the technologies available to shape electromechanical elements on a submillimeter scale. Physics of MEMS devices will be covered at a level necessary to design and analyze new devices and systems. Several commercially available MEMS processes will be discussed in detail, and students will design final projects in these processes. Topical Areas Include: Basic fabrication techniques: lithography, thin film deposition, chemical and plasma etching, anisotropic silicon etching. Device physics: beam theory, electrostatic actuation, capacitive and piezoresistive sensing, thermal sensors and actuators. Standard processes: 2 layer polysilicon, CMOS, LIGA, Electronic interfacing, mechanical and electrical noise, fundamental limits CAD tools: layout, process simulation, PDE and ODE solvers, synthesis.


Prof. Kris Pister

Course Consultant:

Sarah Bergbreiter
Phone: (510) 642-5776
Fax: (510) 643-5877

Office Hours: Tuesday/Thursday 10-11am (PST)
Contact the Cal View Office or email me to make an appointment outside these designated hours.

Contact Information:

For course content and prerequisites, contact the course consultant.

For information regarding registration, pricing or other administrative items, contact the CalVIEW office:

205 McLaughlin Hall
University of California, Berkeley
Berkeley, CA 94720
Phone: (510) 642-5776
Fax: (510) 643-5877
Web Page: