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Project:
All students must complete a design project in order to
complete this course. The project will entail design of a MEMS
device/system of your choosing to be fabricated in a standard process.
More details will be available around the time of
the midterm conference call. A detailed project
write-up will be due at the end of the semester by Friday, December
14.
Project Milestones:
- Two project proposals (at least one paragraph) are due with HW3
on 10/25.
- Detailed outline is due before Thanksgiving on 11/20.
- Final report (at least 4 pages) along with one or more layout files is
due by Friday, December 14.
Project Ideas: Your project should entail some theory,
design, and layout (of test structures and/or your device). You're
encouraged to try something interesting to you - it can relate to your
work outside of class, a question you found interesting during class, or
something you think would be fun. I've included a couple project ideas to
stimulate the creative juices, and a writeup on MEMS resonator projects is
available here.
- Nonlinear springs for electrostatic gap closing
actuators.
- New ideas for electrostatic motors - rotary inchworm for
example.
- New ideas for mechanical versions of electrical components -
mechanical
voltage pump or DAC for example - there is already some literature out
there.
Report: The final report should be 4 pages long and is due at
the end of the semester on Friday, 12/14. Your report should include the
following sections:
- Introduction: describes what you're trying to do and compares
your attempt to related previous work
- Design: describes fabrication method chosen and theory/analysis
done to support design decisions
- Test Structures: describes the design of several test
structures which will help determine the performance of subcomponents of
your system/device.
- Expected Results: to describe the expected performance of your
test structures and your overall system/device - normally this would be
reserved for real results
- Discussion/Conclusion: summarizes your results, why they are so
awesome, and what you would do next
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