• Integrated circuits and fabrication processes must be designed for optimum manufacturability. We will address this issue by discussing several Design for Manufactura bility techniques and tools.
• Experimental design techniques are used to optimize an IC fabrication process. We will discuss techniques ranging from simple comparison of treatments to complex multivariate response surface analysis.
• The widespread application of statistical control in IC production is a major strategic goal for the 1990s. We will cover operator-oriented statistical control methods, as well as novel computer-automated algorithms.
• In-line and in-situ sensors for semiconductor process characterization and control.
• Computer-Aided Manufacturing Infrastructure.

Final Reports Presentation Party

(Tuesday 5/18, 12:30 - 3ish, Hogan Room)

• See news group on presentation instructions and grading considerations.
• Make sure that you get your report to C. Spanos by Sunday 5/16.

 

Teaching Staff

Professor Kameshwar Poolla
E-mail: poolla@jagger.me.berkeley.edu
Phone: 510 642-4642 Fax 643 5599

Place and Time

Available Information (Available on the weekend prior to lectures)

• Handouts
• Homework assignments
• Some papers about Yield
• Important Postings
• Access the ucb.class.ee290h newsgroup