Special Issues in Semiconductor Manufacturing

EECS 290H, 11:00 - 12:30 T&T in 293 Cory, Fall, 2005

Office Hours: Tuesday and Thursday 10-11am

This course addresses the issue of transferring novel IC technologies to high volume, high yield production. Three main topics will be covered:

  1. Experimental design techniques are used to optimize an IC fabrication process. We will discuss techniques ranging from simple comparison of treatments to complex multivariate response surface analysis. 
  2. The widespread application of statistical process control (SPC) in IC production was a major strategic goal for the 1990s. The goal for this decade is Advanced Process Control (APC). We will cover traditional SPC methods and we will detail their continuing evolution towards APC.
  3. Integrated circuits and fabrication processes must be designed for optimum manufacturability. We will address this issue by discussing several Design for Manufacturability techniques and tools.

The course is self-contained for the student whose background includes IC processing (EE143) and design (EE140 or EE141).   

Teaching Staff

Professor Costas J. Spanos                          
spanos@eecs                           
Phone: 510 643 6776
Fax :    510 642 2739
Office Hours: Tue/Thu 10-11am 510 Cory

Fall 05 Weekly Schedule – Quiz Answers

Resources (Generally available on the weekend prior to lectures)

Week

Lecture

Reading (restricted)

Additional Material

Assignments

Solutions

1st   8/29

·     Introduction to IC Yield

·     IC Yield

·  Papers on IC Yield (restricted)

 

 

2nd   9/5

·     Parametric Yield

 

 

·  Homework 1&2, due 9/27/05

·   Solutions

·   Excel Sheet

3rd   9/12

·     Yield Summary

 

·  Worksheet on Defectivity / Cost Analysis

 

 

4th   9/19

·     Basic Statistical Concepts

·     Analysis of Variance

·     Basic Statistics

 

·  Homework 3, due 9/29/05

·   Solutions

5th   9/26

·     2-level Factorials

·     ANOVA and Factorials

 

·  Homework 4, due 10/13/05

·   Solutions

6th   10/3

·     Fractional Factorials

 

 

 

 

7th   10/10

·     Regression Modeling

·     Regression and PCA

 

·  Homework 5, due 10/25/05

·   Solutions

8th   10/17

·     Robust Design

 

 

 

 

9th   10/24

·     SPC Introduction

·     Attribute Charts

·     Statistical Process Control

·  Fall 03 Project Reports (restricted)

·  Homework 6, due 11/3/05

·  Project Selection due 11/3/05

·   Solutions

10th   10/31

·     Control Charts for Variables

·     Acceptance Charts

·     Sample Quiz

·     Sample Quiz Solutions

 

·  Homework 7, due 11/15/05

·   Solutions

11th   11/7

·     CUSUM Charts

·     Multivariate Control

·     Advanced Process Control

 

 

 

12th   11/14

·     Advanced Process Control

·     Open Note QUIZ on Thursday 11/17

 

 

 

 

13th   11/21

·     Sensors and Metrology I

·     SIA Roadmap on Metrology

 

 

 

14th   11/28

·     Sensors and Metrology II

·     In Situ Sensors

·     Metrology

 

 

 

15th   12/5

·     On-Wafer Sensors

 

·  Fall 05 Project Reports (restricted)

·  Project Presentation

·  Project Report

 

 

Last Updated 1/6/2006
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