EE290g -- Intro to MEMS
Tuesday, Thursday 2-3:30 pm
Microelectromechanical systems (MEMS)
is a rapidly growing field that will permeate our everyday
lives in the coming decades.
Silicon processing technology is providing the
opportunity to create micromachines and microsensors
with performance that is often not possible with
mainstream mechanical fabrication techniques.
EE290g is an introduction to this growing field. The course will cover a wide range of subjects - including bulk and thin-film processing, mechanical and electrical design, MEMS design, and an overview of publicly available fabrication processes.