EE290g -- Intro to MEMS

Tuesday, Thursday 2-3:30 pm
299 Cory Hall

#nav bar Microelectromechanical systems (MEMS) is a rapidly growing field that will permeate our everyday lives in the coming decades. Silicon processing technology is providing the opportunity to create micromachines and microsensors with performance that is often not possible with mainstream mechanical fabrication techniques.

EE290g is an introduction to this growing field. The course will cover a wide range of subjects - including bulk and thin-film processing, mechanical and electrical design, MEMS design, and an overview of publicly available fabrication processes.

Taught by Professor Kristofer Pister (pister@eecs.berkeley.edu)
TA: Rob Conant (rconant@bsac.eecs.berkeley.edu)

Class news updated 9/3/97.
Send comments to rconant