Storing and Manipulating Mask Data

Precision: Dimensions relative, so introduce the concept of a minimum resolvable distance, ? (lambda), and then represent all geometry in terms of it. If ? = 0.1?m, and chip edge, ?, is 10cm (worst case), then we need a coordinate space of range 106.

Optimally 3bytes/int, practically 4bytes/int
- (XLL, YLL, XUR, YUR, mask) or (XLL, YLL, L, W, mask)
- 4+4+4+4+1=17 bytes/rectangle ~ O(1012) bytes/mask layer
- Certainly impractical today: Must exploit hierarchy and regularity, and multiprocessing in the design methodology

Precision: Dimensions relative, so introduce the concept of a minimum resolvable distance, ? (lambda), and then represent all geometry in terms of it. If ? = 0.1?m, and chip edge, ?, is 10cm (worst case), then we need a coordinate space of range 106.