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EE 243 (Spring 2012)
Advanced IC Processing and Layout

Lectures: TuTh 11am-12:30pm, Cory 299

Instructor:  Professor Nathan Cheung, Cory 513, 642-1615, cheung@eecs.berkeley.edu

Prof Cheung's Office Hours: Wed 10-12am, Thur 9:30-11am and by appointment via email


1)   Ignore TeleBear, there is no class enrollment limit.


2)   To save you money on textbooks, you can purchase the paperback version of

Plummer, Deal, and Griffin, 'Silicon VLSI Technology: Fundamentals, Practice and Modeling', 1st Edition (2000), Prentice Hall

from online sources.

3)   Course materials and announcements will be posted in BSpace.  All class participants will be notified by email. Verify your registered email with BSpace is active.




LAVA (Lithography Simulation) http://cuervo.eecs.berkeley.edu/Volcano/

Litho Module Videos by Professor Neureuther http://cuervo.eecs.berkeley.edu/Lava/presentations.htm#topical_module

TCAD  support (tsuprem, medici) are only available on UNIX. 

Students can read about out how to run them at

To access EE243 Newsgroup or TCAD software from non-Berkeley connections, see instructions

Last updated  1/12/2012

Report typos and missing links to cheung@eecs.berkeley.edu

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