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EE243 Advanced IC Processing and Layout
Spring 2010  Lecture Notes

The Lectures Notes only show highlights of important course topics and are not intended to be a substitute for reading assignments. Please consult the required reading material for derivations and narrative descriptions. Exams will not cover topics in slides labeled "For reference only" .

Lecture #1 (1/19/10)  7500kb

Lecture #2 (1/21/10)  850kb

Lecture #3 (1/26/10)  1683kb

Lecture #4 (1/28/10)  9840kb

Lecture #5 (2/2/10)  1030kb

Lecture Defects Tutorial (2/2/10)  1265kb

Lecture #6 (2/4/10)  2060kb

Lecture #7 (2/9/10)  2708kb

Lecture #8 (2/11/10)  1250kb

Lecture Implantation Disorder (2/11/10) 850kb FOR REFERENCE ONLY

Lecture #9 (2/16/10)  1090kb

Lecture #10 (2/18/10)  1003kb

Lecture #11 (2/23/10)  1230kb

Lecture #12 (2/25/10)  1454kb

Lecture #13 (3/2/10)  2274kb

Lecture #14 (3/4/10)  1956kb

Lecture #15 (3/9/10)  1500kb

Lecture #16 (3/11/10)  3400kb

Lecture #17 (3/16/10)  1718kb

Lecture #18 (3/18/10)  1849kb

Lecture #19 (3/30/10)  Quick Midterm Review 1900kb

Lecture #20 (4/1/10)  1400kb

Lecture #21 (4/6/10)  2653kb

Lecture #22 (4/8/10)  3040kb

Lecture #23 (4/13/10)  1840kb

Lecture #24 (4/15/10)  2990kb

Lecture #25 (4/20/10)  2990kb

Lecture #26 (4/22/10)  1149kb

Lecture #27 (4/27/10)  345kb

Lecture #28 (4/29/10)  6569kb 

Last updated 4-27-2010

The materials used in this course have been co-developed with Professors Andy Neureuther and Costas Spanos. The textbook is Plummer, Deal and Griffin, 'Silicon VLSI Technology: Fundamentals, Practice and Modeling', Prentice Hall. See Course info page for other required readings
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