Home Course Info Lecture Notes Homework and Exams Handouts Past EE143

EE 243 (Spring 2010)
Advanced IC Processing and Layout

Handouts

• Optical Lithograhy Sheats-Smith Chap 3 3910kb
• Optical Lithograhy Sheats-Smith Chap 2 2767kb
• ALD Review paper 1116kb
• CMP Review paper Lu and Dornfeld 2065kb
• CMP_Review Zantye et al 5000kb
• Chapter 4 May and Spanos
• Chapter 6 May and Spanos
• Chapter 7 May and Spanos
• Statistics Table of May and Spanos

· Prof. Neureuther’s audio/visual modules on Lithography

• Peterson and Steinherz A Short Course on Vacuum Technology

Last updated  3-19-2010
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