Home Course Info Lecture Notes Homework and Exams Handouts Newsgroup

EE 243 (Spring 2009)
Advanced IC Processing and Layout

Handouts

• Sheats-Smith Chap 3 3910kb
• ALD Review paper 1116kb

· Prof. Neureuther’s audio/visual modules on Lithography

• CMP Review paper Lu and Dornfeld 2065kb
• Chapter 4 May and Spanos
• Chapter 6 May and Spanos
• Chapter 7 May and Spanos

Last updated  4-15-2008
Usage of this site is subject to the Computer Usage Policy.