Instructor: Professor Ming C. Wu, mingwu@berkeley.edu Office: 511 SDH
Office Hours: Tuesday 2-3 pm; Friday 3-4 pm @ 511 SDH
Co-Instructor: Dr. Ali Darvishian, darvishian@berkeley.edu
GSI: Jean-Etienne Tremblay, jetremblay@berkeley.edu (10 hour GSI)
Office Hours: Thursdays 4-5 pm at 212 Cory
Lectures: Tuesday and Thursday 12:40 – 2:00 PM at 521 Cory
Discussions: Friday 1:10 – 2:00 pm at 88 Dwinelle
Final Exam: 12/12/019 (Thursday) 11:00 – 2:00 pm @ 320 Soda Hall
EE247A Project Presentation: 12/9/2019 (Monday) 1:00 – 2:30 @ 405 Soda Hall
Website: http://mingwuclass.berkeley.edu/
bCourses: For grades, HW submission, solution posting
Piazza: Online discussions, Q&A; Sign up at here
Objective:
This course will teach fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other technologies that are central to MEMS fabrication. It will pay special attention to teaching of fundamentals necessary for the design and analysis of devices and systems in mechanical, electrical, fluidic, and thermal energy/signal domains, and will teach basic techniques for multi-domain analysis. Fundamentals of sensing and transduction mechanisms including capacitive and piezoresistive techniques, and design and analysis of micmicromachined miniature sensors and actuators using these techniques will be covered.
Prerequisite:
This course is designed for students with diverse backgrounds from EE, CS, ME, MSE, BioE, ChemE, … The main prerequisites are freshman physics (Physics 7B), and some intro in EE (EE16A/16B).
Textbook: no required textbook. The following books are useful
- Jaeger, Introduction to Microelectronic Fabrication, 2nd edition (highly recommended if you don’t have fabrication background) [R] (Reserved in Engineering Library)
- Kubby, A Guide to Hands-on MEMS Design and Prototyping
- Kovacs, Micromachined Transducers Sourcebook [R]
- Liu, Foundations of MEMS, 2nd edition [R]
- Korvink & Paul, MEMS: A Practical Guide to Design, Analysis, and Applications
- Senturia, Microsystem Design
- Madou, Fundamentals of Microfabrication [R]
- Young, Roark’s Formulas for Stress and Strain
Grading: EE147 and 247A will be graded separately:
EE147 | EE247A | |
Homework | 35% | 30% |
Midterm | 25% | 15% |
Final | 40% | 30% |
Final Project | (+10%)* | 25%** |
* EE147 mini-project (Optional): Fun applications of MEMS sensors using kits described here.
** EE247A project: 4-page research report in IEEE journal format. More details in class.
Homework:
HW will be self-graded according to the Rubric. You need to submit HW on bCourses before the due date, and submit your grade within a week after Rubric is published.
Midterm:
One Midterm will be held in class (80 minutes), tentatively on 10/17/2019, Thursday. It will be closed book, with one-page cheat sheet allowed (double sided).
Academic Dishonesty:
Department policy can be found here. Cheating will result in automatic Fail. Copying homeworks or projects is considered cheating.
Course Accommodations:
Students may request accommodation of religious creed, disabilities, and other special circumstances. Please make an appointment with Prof. Wu to discuss your request before the end of second week so that he can plan accordingly in advance.